Aerotech has introduced a series of rotary air-bearing stages designed for high precision angular positioning and velocity stability.
The stages use a slotless, brushless motor that is inherently zero-cogging and torque ripple-free to maximise positioning accuracy. According to the company, the low-profile design reduces effective working height, minimising stack-up errors.
The ABRS stages meet the exacting motion control requirements of semiconductor wafer inspection, high precision metrology, x-ray diffraction, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.
Applications requiring exceptional planar performance will benefit from large air-bearing surfaces that provide high stiffness and load capacity for reduced face error motion, the company says.
A direct coupled, high accuracy rotary encoder achieves resolution of <0.03 arc second and accuracy of ±1 arc second or less when used with the unit’s feedback multipliers and controls.
A clear aperture facilitates product feed-through, laser beam delivery, cable clearance or other application-specific requirements.
Custom versions of the ABRS are available for rate table and inertial guidance test-stand applications.
Lastek
08 8443 8668 – sales@lastek.com.au
www.aerotech.com